Synthesis of ZnO nanorod on glass substrate by high temperature hydrothermal method and applied on the photodetector
Tsai Jenn-Kai1, Chen Kuan-Chia1*, Syu Ming-Yang1, Tang Jyun-Yung1
1Electronic Engineering, National Formosa University, Yunlin, Taiwan
* presenting author:KUAN-CHIA CHEN, email:10360117@gm.nfu.edu.tw
In the study, the ZnO nanorods were fabricated on glass substrate by high-temperature hydrothermal method. The enhancement of sensing performance was mainly attributed to the large effective surface area and more subtle structure of ZnO NRs surface. First, the ZnO film was deposited on the glass substrate by RF sputtering. Subsequently, the ZnO nanorods were fabricated on glass substrate by high-temperature hydrothermal method. Finally, Au film was deposited on the sample by using E-Gun evaporated through an interdigitated shadow mask onto the ZnO seed layer to form contact electrodes. The ZnO nanorods sample were characterized by using a high-resolution scanning electron microscopy (Hitachi S-4700I). A X-ray diffractometer (XRD) was used to characterize the crystallographic and structural properties of the as-grown ZnO nanorods. A Keithley 2400 semiconductor parameter analyzer was then used to measure the I-V and photodetector characteristic of the fabricated device.


Keywords: ZnO nanorods, photodetector