Direct Growth of Epitaxial Vanadium Dioxide Films on Flexible and Transparent Muscovite
Jheng-Cyuan Lin1, Chien-I Li2*, Heng-Jui Liu1, Hsin-Wei Huang3, Hsiao-Wen Chen4, Chih-Ya Tsai5, Wen-Feng Hsieh5, Hsiang-Lin Liu4, Ming-Wen Chu6, Hong-Ji Lin3, Ying-Hao Chu1,2,7
1Institute of Physics, Academia Sinica, Taipei, Taiwan
2Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu, Taiwan
3National Synchrotron Radiation Research Center, Hsinchu, Taiwan
4Department of Physics, National Taiwan Normal University, Taipei, Taiwan
5Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu, Taiwan
6Center for Condensed Matter Sciences, National Taiwan University, Taipei, Taiwan
7Department of Electrophysics, National Chiao Tung University, Hsinchu, Taiwan
* presenting author:CHIEN-I LI,
Vanadium dioxide (VO2) is a compelling candidate to build a new electronic system beyond the conventional silicon-based device, because it undergoes a sharp metal-insulator transition due to its inherent electronic structure. In this study, in order to integrate the VO2 film for flexible electronics, we demonstrate a direct growth of epitaxial VO2 film on a transparent and flexible muscovite via Van der Waals epitaxy. The microstructure and characteristics of structure transition of epitaxial VO2 films on muscovite are examined by a combination of high-resolution XRD, TEM and Raman spectroscopy. The unique metal-insulator transition of VO2 is also revealed in the electrical and optical measurements with ΔR/R > 104 and ΔTr > 50%. Furthermore, due to the nature of muscovite, the VO2/muscovite heterostructures could be bended easily by external force and the substrate could effortlessly be removed to acquire the free-standing VO2 film. The approach demonstrated in this study paves an intriguing way to integrate functional VO2 film on flexible substrate and creates a brand new route for the applications in flexible electronics.

Keywords: Vanadium Dioxide, Muscovite, Flexible Electronics