Epitaxial Transparent, Conductive Oxide Thin Film on Flexible Substrate
Ching Chen1*, Hien Do1, Jheng Cyuan Lin1, Ying Hao Chu1
1Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu, Taiwan
* presenting author:Ching Chen, email:lkb2934@gmail.com
Transparent conductive oxides(TCOs) on flexible substrate got much attention because of great potential for next generation of electrical devices. Al-doped zinc oxide, most potential TCOs material, had lots of excellent properties for application. In this work, we present epitaxial AZO thin film on muscovite mica substrate that is flexible and transparent. Muscovite mica, a two-dimensional material, has high melting point(higher than 700 degrees) which makes it better than polymer substrate. Characterization of AZO thin film were done by different method. In structure part, we used X-ray diffraction, atomic force microscope, and reflection high-energy electron diffraction. Moreover, UV-Vis transmittance spectrum, sheet resistance and Hall-effect measurement were done to check its transparent and conductive properties.

Keywords: TCOs, flexible , AZO, mica